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14.3 Vacuum film deposition techniques 14.3.1 Physical Vapour Deposition PVD 14.3.2 Epitaxy and Molecular Beam Epitaxy MBE 14.3.3 Chemical Vapour Deposition CVD 14.3.4 Atomic Layer Deposition ALD 14.4 Nanomaterials growth approaches top-down and bottom-up Lecture 14 2 14.1 Thermodynamics and kinetics of thin film growth What is a .
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